| Feature | XPS Peak 41 | Modern Software (CasaXPS, Avantage, PyMCA) | | :--- | :--- | :--- | | | Free | $1,000–$10,000 (commercial) or free (open-source) | | Background | Shirley, Linear, Tougaard | Shirley, Tougaard, Smart, Spline, Polynomial | | Constraints | Basic doublet constraints | Full parameter linking, differential equations for complex multilayers | | Quantification | Manual RSF entry | Integrated RSF libraries, transmission function correction | | Statistical Tests | Covariance matrix only | Monte Carlo error estimation, F-tests, goodness-of-fit | | Charge Correction | None | Automated referencing, differential charge compensation | | OS Support | Windows 95–XP | Windows 10/11, macOS, Linux |

Some of the key benefits of using XPS Peak 41 software include:

It includes parameters to model the asymmetric peaks typical of metallic conductors, using specific asymmetry and "TS" parameters.